Products

Mass Wafer Transfer Maschine | SWTM-Series

The SWTM Mass Wafer Transfer tool is cabable of wafer transfer from plastic to plastic.
With this automatic system it is possible to transfer all wafer of a cassette to the other. The system is equipped with one cassette-stations, mechanical wafer notch/flat-aligner, and a Grippermechanism.
Models available for 100, 125, 150 and 200mm wafers.

Possible Transfer Modes:

• Storage Cassette -> Process Cassette
• Process Cassette -> Teflon Cassette
• High Profile Cassette -> Low Profile Cassette

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• Throughput up to 2000 wph
• Low cost of ownership
• Integrated Flat/Notch Aligner
• Edge gripping
• No vacuum needed
• Full SECS/GEM compliance
• ESD safe
  
• RFID Cassette Identification on request

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