Your wafer-handling specialist
We propose a wide range of wafer-reading, sorting and transfer tools.
Our systems are designed for 100, 125 ,150 and 200mm wafer diameters, also Thinwaferhandling systems down to 70μm (micron) thiness are available.
Capability to handle Siliconwafers, Sapphirewafer, Glasswafer, Taikowafers etc..
Handling of wafers with warp up to +/- 4mm
All mechanical parts, electronic and software is made inhouse, so we can deliver very customized solutions.
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Four-Cassette-Sorter FCS
- 4 automatic tilting loadports.
- Throughput up to 700 wph.
- Full SECS/GEM compliance
- Low cost of ownership.
- Smart design & Reliable
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WaferID-Reader WMS
- Batch WaferID Reader.
- Integrated Flat/Notch Aligne.r
- Time to read 25 wafers < 60 sec.
- Full SECS/GEM compliance.
- Table top system.
- ESD-Safe.
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Two-Cassette-Sorter TCS
- 2 loadports with integrated aligner.
- Throughput up to 500 wph.
- Full SECS/GEM compliance.
- Table top system.
- Smart design & Reliable
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Mass Wafer-Transfer-System WTM
- Batch Wafer Transfer.
- Integrated Flat/Notch Aligner
- Plastic >> Plastic.
- Plastic >> Quarz.
- High/Low profile cassette compatibility.
- Low cost of ownership.
- Table top system
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Two-Cassette-Sorter CTS
- 2 automatic tilting loadports.
- Throughput up to 700 wph.
- Full SECS/GEM compliance
- Low cost of ownership.
- Smart design & Reliable
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Automatic Wafer-Aligner NF200
- Standalone system.
- Very small footprint.
- Precise alignment +/- 1°.
- 0-360° in 1° steps are available.
- Waferinspection Mode.
- ESD safe.
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