Products

Single/Mass Wafer Transfer | SWTS-Series

The SWTS-Series is designed for automatic wafer transfer.
With this system it is possible to split, merge, sort, compress wafer-lots, or create individual wafer-mix as desired. The system is equipped with two load-ports and mechanical wafer notch/flat-aligners.

The waferhandling is realized via edge gripping, so no vacuum is required.
The system is equipped also with a automatic Mass Wafer Gripper to transfer a whole batch.
Models available for 100, 125, 150 and 200mm wafers.

• Throughput up to 700 wph
• Low cost of ownership
• Tabletop system or with stand
• No vacuum needed
• Single and Mass Wafertransfer
• Full SECS/GEM compliance
• Windows operating system
• ESD safe
• RFID Cassette Identification on request
• Upgrade to Waferidentification possible
• Reliable and no wearing parts

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