Single/Mass Wafer Transfer | SWTS-Series

The SWTS-Series is designed for automatic wafer transfer.
With this system it is possible to split, merge, sort, compress wafer-lots, or create individual wafer-mix as desired. The system is equipped with two load-ports and mechanical wafer notch/flat-aligners.

The waferhandling is realized via edge gripping, so no vacuum is required.
The system is equipped also with a automatic Mass Wafer Gripper to transfer a whole batch.
Models available for 100, 125, 150 and 200mm wafers.

  • Throughput up to 700 wph
  • Low cost of ownership
  • Tabletop system or with stand
  • No vacuum needed
  • Single and Mass Wafertransfer
  • Full SECS/GEM compliance
  • Windows operating system
  • ESD safe
  • RFID Cassette Identification on request
  • Upgrade to Waferidentification possible
  • Reliable and no wearing parts

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