Mass Wafer ID Read System | WMS-Series
The WMS-Series is designed to read the WaferID's of a Waferlot.
With this system all 25 wafers or individual wafers can be read for wafer tracking.
The system is equipped with a wafer notch/flat-aligner, a wafer presence/absence sensor, two linear-axis and waferID Reader.
The Mapdata can be sent over the GEM-Interface or via ASCII-File to the host.
On request the WMS is able to read also the front and the backside of a wafer.
Models available for 100, 125, 150 and 200mm wafers.
- Cycletime to align, scan and read 25 wafers < 80 sec
- Low cost of ownership
- Compact footprint 580 x 380 mm
- Full SECS/GEM compliance
- Windows operating system
- TouchPanel PC
- ESD safe
- Waferbackside ID-reading possible
- RFID Cassette Identification on request
- Other Interfaces on request
- Reliable
Waferscribes readable by the system
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WMS-Series
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WMS-Series
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WMS-Series
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WMS-Series