Quarz Boat Loader | QBL-Series

The QBL Mass Wafer Transfer tool is cabable of wafer transfer from plastic to quarz and vice versa.
With this automatic system it is possible to transfer all wafer of a cassette to a quarz carrier. The system is equipped with two cassette-stations, mechanical wafer notch/flat-aligner, and a Grippermechanism.
Models available for 100, 125, 150 and 200mm wafers.

Possible Transfer Modes:

  • Storage Cassette -> Quarz Carrier
  • Process Cassette -> Quarz Carrier
  • Plastic Cassette -> Plastic Cassette (source cassette must be replaced with the target cassette)

  • Throughput up to 2000 wph
  • Low cost of ownership
  • Integrated Flat/Notch Aligner
  • Edge gripping
  • No vacuum needed
  • Full SECS/GEM compliance
  • Windows operating system
  • ESD safe
  • RFID Cassette Identification on request

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